Toshiba SR1054HSPCR Instruction Manual

Page of 19
STE 58792 
– 12 – 
3.2 
Scavenging Piping in the Robot 
 
An air tube is incorporated in the clean robot for scavenging. 
Figures 3.1 and 3.2 show the piping of the air tube. 
When operating the robot as the clean robot, scavenge through the air fitting, using 
a scavenging vacuum pump (or equivalent to be provided by the user).    Yardstick 
for the scavenging volume is 75 liters/min. 
If the robot is operated without scavenging, the specified degree of cleanliness 
cannot be maintained. 
 
Figure 3.1 
SR–654HSP–CR scavenging air piping